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Conference contributions
Two-dimensional profiling in silicon using conventional and electrochemical selective etching
Publication:
Two-dimensional profiling in silicon using conventional and electrochemical selective etching
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Date
1997
Proceedings Paper
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2162.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Trenkler, Thomas
;
Vandervorst, Wilfried
;
Hellemans, L.
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Abstract
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1874
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Acq. date: 2025-12-17
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Metrics
Views
1874
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-17
Citations