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Articles
Reliability of copper low-k interconnects
Publication:
Reliability of copper low-k interconnects
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tokei, Zsolt
;
Croes, Kristof
;
Beyer, Gerald
Journal
Microelectronic Engineering
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1863
since deposited on 2021-10-18
Acq. date: 2025-12-15
Citations
Metrics
Views
1863
since deposited on 2021-10-18
Acq. date: 2025-12-15
Citations