The effect of composition on the bond structure and refractive index of silicon nitride

Verlaan, Vasco; Verkerk, A.D.; Arnoldbik, W.M.; Van der Werf, C.H.M.; Bakker, R.; Houweling, Z.S.; Romijn, I.G.; Borsa, D.M.; Weeber, A.W.; Luxembourg, S.L.; Zeman, M.; Dekkers, Harold; Schropp, R.E.I.

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The effect of composition on the bond structure and refractive index of silicon nitride

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2009

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Thin Solid Films

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1885 since deposited on 2021-10-18

Acq. date: 2026-06-11

The effect of composition on the bond structure and refractive index of silicon nitride

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