Publication:

The effect of composition on the bond structure and refractive index of silicon nitride

Date

2009
Journal article
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Author(s)

Verlaan, Vasco
;
Verkerk, A.D.
;
Arnoldbik, W.M.
;
Van der Werf, C.H.M.
;
Bakker, R.
;
Houweling, Z.S.
;
Romijn, I.G.
;
Borsa, D.M.
;
Weeber, A.W.
;
Luxembourg, S.L.
;
Zeman, M.
;
Dekkers, Harold  
;
Schropp, R.E.I.

Journal

Thin Solid Films

Abstract

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