Publication:
The effect of composition on the bond structure and refractive index of silicon nitride
Date
| dc.contributor.author | Verlaan, Vasco | |
| dc.contributor.author | Verkerk, A.D. | |
| dc.contributor.author | Arnoldbik, W.M. | |
| dc.contributor.author | Van der Werf, C.H.M. | |
| dc.contributor.author | Bakker, R. | |
| dc.contributor.author | Houweling, Z.S. | |
| dc.contributor.author | Romijn, I.G. | |
| dc.contributor.author | Borsa, D.M. | |
| dc.contributor.author | Weeber, A.W. | |
| dc.contributor.author | Luxembourg, S.L. | |
| dc.contributor.author | Zeman, M. | |
| dc.contributor.author | Dekkers, Harold | |
| dc.contributor.author | Schropp, R.E.I. | |
| dc.contributor.imecauthor | Dekkers, Harold | |
| dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
| dc.date.accessioned | 2021-10-18T04:50:36Z | |
| dc.date.available | 2021-10-18T04:50:36Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 0040-6090 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16482 | |
| dc.source.beginpage | 3499 | |
| dc.source.endpage | 3502 | |
| dc.source.journal | Thin Solid Films | |
| dc.source.volume | 517 | |
| dc.title | The effect of composition on the bond structure and refractive index of silicon nitride | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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