Publication:
Optimisation of PECVD poly-SiGe layers for MEMS post-processing on top of CMOS
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1928 since deposited on 2021-10-16
2last month
Acq. date: 2026-02-25
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Statistics
Views
1928 since deposited on 2021-10-16
2last month
Acq. date: 2026-02-25
Citations