Publication:
Optimisation of PECVD poly-SiGe layers for MEMS post-processing on top of CMOS
Date
| dc.contributor.author | Mehta, Anshu | |
| dc.contributor.author | Gromova, Maria | |
| dc.contributor.author | Czarnecki, Piotr | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Czarnecki, Piotr | |
| dc.date.accessioned | 2021-10-16T03:22:31Z | |
| dc.date.available | 2021-10-16T03:22:31Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10873 | |
| dc.source.beginpage | 1326 | |
| dc.source.conference | Proceedings 13th International Conference on Solid State Sensors, Actuators and Microsystems - TRANSDUCERS | |
| dc.source.conferencedate | 5/06/2005 | |
| dc.source.conferencelocation | Seoul Korea | |
| dc.source.endpage | 1329 | |
| dc.title | Optimisation of PECVD poly-SiGe layers for MEMS post-processing on top of CMOS | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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