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Optical proximity correction: a cross road of data flows
Publication:
Optical proximity correction: a cross road of data flows
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Date
2016
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Bisschop, Peter
Journal
Japanese Journal of Applied Physics
Abstract
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1933
since deposited on 2021-10-23
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Acq. date: 2025-12-15
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Metrics
Views
1933
since deposited on 2021-10-23
2
last month
Acq. date: 2025-12-15
Citations