Publication:
Optical proximity correction: a cross road of data flows
Date
| dc.contributor.author | De Bisschop, Peter | |
| dc.contributor.imecauthor | De Bisschop, Peter | |
| dc.date.accessioned | 2021-10-23T10:24:38Z | |
| dc.date.available | 2021-10-23T10:24:38Z | |
| dc.date.issued | 2016 | |
| dc.identifier.issn | 0021-4922 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26490 | |
| dc.identifier.url | http://iopscience.iop.org/article/10.7567/JJAP.55.06GA01/meta | |
| dc.source.beginpage | 06GA01 | |
| dc.source.issue | 6 | |
| dc.source.journal | Japanese Journal of Applied Physics | |
| dc.source.volume | 55 | |
| dc.title | Optical proximity correction: a cross road of data flows | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |