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Improvement of the CMOS characteristics of bulk Si FinFETs by high temperature ion implantation
Publication:
Improvement of the CMOS characteristics of bulk Si FinFETs by high temperature ion implantation
Date
2016
Meeting abstract
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34413.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kikuchi, Yoshiaki
;
Hopf, Toby
;
Mannaert, Geert
;
Tao, Zheng
;
Waite, A.
;
Cournoyer, J.
;
Borniquel, J.
;
Schreutelkamp, Rob
;
Ritzenthaler, Romain
;
Kim, Min-Soo
;
Kubicek, Stefan
;
Chew, Soon Aik
;
Devriendt, Katia
;
Schram, Tom
;
Demuynck, Steven
;
Variam, N.
;
Horiguchi, Naoto
;
Mocuta, Dan
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1907
since deposited on 2021-10-23
Acq. date: 2025-10-23
Citations
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Views
1907
since deposited on 2021-10-23
Acq. date: 2025-10-23
Citations