Publication:

Improvement of the CMOS characteristics of bulk Si FinFETs by high temperature ion implantation

Date

2016
Meeting abstract
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dc.contributor.authorKikuchi, Yoshiaki
dc.contributor.authorHopf, Toby
dc.contributor.authorMannaert, Geert
dc.contributor.authorTao, Zheng
dc.contributor.authorWaite, A.
dc.contributor.authorCournoyer, J.
dc.contributor.authorBorniquel, J.
dc.contributor.authorSchreutelkamp, Rob
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorKim, Min-Soo
dc.contributor.authorKubicek, Stefan
dc.contributor.authorChew, Soon Aik
dc.contributor.authorDevriendt, Katia
dc.contributor.authorSchram, Tom
dc.contributor.authorDemuynck, Steven
dc.contributor.authorVariam, N.
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorMocuta, Dan
dc.contributor.imecauthorKikuchi, Yoshiaki
dc.contributor.imecauthorHopf, Toby
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2021-10-23T11:47:39Z
dc.date.available2021-10-23T11:47:39Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26830
dc.source.beginpage460
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate3/12/2016
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage463
dc.title

Improvement of the CMOS characteristics of bulk Si FinFETs by high temperature ion implantation

dc.typeMeeting abstract
dspace.entity.typePublication
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