Publication:
Modelling and experimental investigation of silicide-induced mechanical stress and strain in transistors technology
Date
| dc.contributor.author | Torregiani, Cristina | |
| dc.contributor.thesisadvisor | Maex, Karen | |
| dc.contributor.thesisadvisor | Van Houtte, P. | |
| dc.date.accessioned | 2021-10-17T11:21:25Z | |
| dc.date.available | 2021-10-17T11:21:25Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2008-03 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14570 | |
| dc.title | Modelling and experimental investigation of silicide-induced mechanical stress and strain in transistors technology | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |