Publication:
Study of origin, impact and solutions of processing damage in low dielectric constant materials for advanced interconnect applications
Date
| dc.contributor.author | Urbanowicz, Adam | |
| dc.contributor.thesisadvisor | De Gendt, Stefan | |
| dc.contributor.thesisadvisor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-18T22:33:13Z | |
| dc.date.available | 2021-10-18T22:33:13Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2010-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18113 | |
| dc.title | Study of origin, impact and solutions of processing damage in low dielectric constant materials for advanced interconnect applications | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |