Publication:

Analysis of the induced stresses in silicon during thermocompression Cu-Cu bonding of Cu-through-vias in 3D-SIC architecture

Date

Loading...
Thumbnail Image

Abstract

Description

Metrics

Views

1938 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-06

Citations

Metrics

Views

1938 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-06

Citations