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Epitaxial growth schemes for fin and Gate All Around devices
Publication:
Epitaxial growth schemes for fin and Gate All Around devices
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Date
2018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Hikavyy, Andriy
;
Rosseel, Erik
;
Porret, Clément
;
Vohra, Anurag
;
Kohen, David
;
Margetis, Joe
;
Tolle, John
;
Langer, Robert
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1878
since deposited on 2021-10-25
1
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Acq. date: 2025-12-11
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Metrics
Views
1878
since deposited on 2021-10-25
1
last month
Acq. date: 2025-12-11
Citations