Impact of cobalt silicidation on the low-frequency noise behavior of shallow P-N junctions

dc.contributor.author	Lukyanchikova, N. B.
dc.contributor.author	Petrichuk, M. V.
dc.contributor.author	Garbar, N.
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Poyai, Amporn
dc.contributor.author	Claeys, Cor
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-14T13:17:45Z
dc.date.available	2021-10-14T13:17:45Z
dc.date.embargo	9999-12-31
dc.date.issued	2000
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4543
dc.source.beginpage	408
dc.source.endpage	410
dc.source.issue	8
dc.source.journal	IEEE Electron Device Letters
dc.source.volume	21
dc.title	Impact of cobalt silicidation on the low-frequency noise behavior of shallow P-N junctions
dc.type	Journal article
dspace.entity.type	Publication
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