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In-situ characterization of the oxidation degree of the sputter surface and the oxygen enhancement of the ionization probability of Si

Date

2000
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dc.contributor.authorJanssens, Tom
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-14T13:06:28Z
dc.date.available2021-10-14T13:06:28Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4450
dc.source.conferenceSIMS Workshop
dc.source.conferencedate1/05/2000
dc.source.conferencelocationLake Tahoe, CA USA
dc.title

In-situ characterization of the oxidation degree of the sputter surface and the oxygen enhancement of the ionization probability of Si

dc.typeOral presentation
dspace.entity.typePublication
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