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Continued scalability of copper/low-k interconnects
Publication:
Continued scalability of copper/low-k interconnects
Date
2005
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brongersma, Sywert
;
Carbonell, Laure
;
Vanstreels, Kris
;
Iacopi, Francesca
;
D'Haen, Jan
;
Zhang, Wenqi
;
Travaly, Youssef
;
Demuynck, Steven
;
Tokei, Zsolt
;
De Ceuninck, Ward
;
Maex, Karen
Journal
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1990
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1990
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations