Publication:

Continued scalability of copper/low-k interconnects

Date

2005

Presentation

Simple item page Full metadata Statistics

Author(s)

Brongersma, Sywert

;

Carbonell, Laure

;

Vanstreels, Kris

;

Iacopi, Francesca

;

;

Zhang, Wenqi

;

Travaly, Youssef

;

Demuynck, Steven

;

;

De Ceuninck, Ward

;

Statistics

1995 since deposited on 2021-10-16

Acq. date: 2026-07-27