Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples
Publication:
Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples
Copy permalink
Date
2000
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
4773.pdf
152.74 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Stephenson, Robert
;
Verhulst, Anne
;
De Wolf, Peter
;
Caymax, Matty
;
Vandervorst, Wilfried
Journal
J. Vacuum Science and Technology B
Abstract
Description
Metrics
Views
1948
since deposited on 2021-10-14
Acq. date: 2026-01-11
Citations
Metrics
Views
1948
since deposited on 2021-10-14
Acq. date: 2026-01-11
Citations