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Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples
Publication:
Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples
Date
2000
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Stephenson, Robert
;
Verhulst, Anne
;
De Wolf, Peter
;
Caymax, Matty
;
Vandervorst, Wilfried
Journal
J. Vacuum Science and Technology B
Abstract
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1948
since deposited on 2021-10-14
3
last month
1
last week
Acq. date: 2025-12-08
Citations
Metrics
Views
1948
since deposited on 2021-10-14
3
last month
1
last week
Acq. date: 2025-12-08
Citations