Publication:

Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples

Date

2000
Journal article
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dc.contributor.authorStephenson, Robert
dc.contributor.authorVerhulst, Anne
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.date.accessioned2021-10-14T13:51:01Z
dc.date.available2021-10-14T13:51:01Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4772
dc.source.beginpage405
dc.source.endpage408
dc.source.issue1
dc.source.journalJ. Vacuum Science and Technology B
dc.source.volumeB18
dc.title

Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples

dc.typeJournal article
dspace.entity.typePublication
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