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Impact of precursor chemistry on atomic layer deposition of lutetium aluminates
Publication:
Impact of precursor chemistry on atomic layer deposition of lutetium aluminates
Date
2012
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Nyns, Laura
;
Shi, Xiaoping
;
Tielens, Hilde
;
Van Elshocht, Sven
;
Date, Lucien
;
Schreutelkamp, Rob
Journal
Journal of Vacuum Science and Technology A
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1931
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1931
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations