Impact of precursor chemistry on atomic layer deposition of lutetium aluminates

dc.contributor.author	Nyns, Laura
dc.contributor.author	Shi, Xiaoping
dc.contributor.author	Tielens, Hilde
dc.contributor.author	Van Elshocht, Sven
dc.contributor.author	Date, Lucien
dc.contributor.author	Schreutelkamp, Rob
dc.contributor.imecauthor	Nyns, Laura
dc.contributor.imecauthor	Tielens, Hilde
dc.contributor.imecauthor	Van Elshocht, Sven
dc.contributor.imecauthor	Date, Lucien
dc.contributor.orcidimec	Nyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimec	Van Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned	2021-10-20T13:58:46Z
dc.date.available	2021-10-20T13:58:46Z
dc.date.embargo	9999-12-31
dc.date.issued	2012
dc.identifier.issn	0734-2101
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/21214
dc.source.beginpage	01A120
dc.source.issue	1
dc.source.journal	Journal of Vacuum Science and Technology A
dc.source.volume	30
dc.title	Impact of precursor chemistry on atomic layer deposition of lutetium aluminates
dc.type	Journal article
dspace.entity.type	Publication
Files	Original bundle Name: 22595.pdf Size: 447.59 KB Format: Adobe Portable Document Format Download
Publication available in collections:	Articles

Date