Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density

Degroote, Bart; Rooyackers, Rita; Vandeweyer, Tom; Collaert, Nadine; Boullart, Werner; Kunnen, Eddy; Shamiryan, Denis; Wouters, J.; Van Puymbroeck, Jan; Dixit, Abhisek; Jurczak, Gosia

Publication:

Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density

Date

2007

Journal article

Simple item page Full metadata Statistics

Files

16222.pdf 1.2 MB

Author(s)

;

;

;

;

;

;

;

;

;

;

Journal

Microelectronic Engineering

Statistics

1880 since deposited on 2021-10-16

2last month

Acq. date: 2026-05-18

Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations