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Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology
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Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology
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Date
2019
Proceedings Paper
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41925.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Westerveld, Wouter
;
Figeys, Bruno
;
Gao, Hang
;
Huang, Chih-Hsien
;
Verhaegen, Fabian
;
Troia, Benedetto
;
Haouari, Rachid
;
Neutens, Pieter
;
O'Callaghan, John
;
Lenci, Silvia
;
Rottenberg, Xavier
;
Jansen, Roelof
;
Rochus, Veronique
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Acq. date: 2025-12-12
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Views
2105
since deposited on 2021-10-27
1
last month
Acq. date: 2025-12-12
Citations