Publication:
N2 as alternative to H2 as carrier gas in CVD Si-epitaxy; double win-win situation
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1947 since deposited on 2021-10-15
2last month
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Acq. date: 2025-12-10
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1947 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2025-12-10
Citations