Publication:
N2 as alternative to H2 as carrier gas in CVD Si-epitaxy; double win-win situation
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1949 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-25
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Statistics
Views
1949 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-25
Citations