Publication:
N2 as alternative to H2 as carrier gas in CVD Si-epitaxy; double win-win situation
Date
| dc.contributor.author | Meunier-Beillard, Philippe | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Van Hoeymissen, Jan | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.date.accessioned | 2021-10-15T05:44:26Z | |
| dc.date.available | 2021-10-15T05:44:26Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7901 | |
| dc.source.conference | 10th ISESH Conference | |
| dc.source.conferencedate | 29/06/2003 | |
| dc.source.conferencelocation | Noordwijk Nederland | |
| dc.title | N2 as alternative to H2 as carrier gas in CVD Si-epitaxy; double win-win situation | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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