Publication:
Design and characterization of CMOS compatible mircromirror arrays in SiGe MEMS technology
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1908 since deposited on 2021-10-19
1last month
Acq. date: 2026-03-17
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Views
1908 since deposited on 2021-10-19
1last month
Acq. date: 2026-03-17
Citations