Publication:
Design and characterization of CMOS compatible mircromirror arrays in SiGe MEMS technology
Date
| dc.contributor.author | Beernaert, Roel | |
| dc.contributor.thesisadvisor | De Smet, Herbert | |
| dc.date.accessioned | 2021-10-19T12:32:22Z | |
| dc.date.available | 2021-10-19T12:32:22Z | |
| dc.date.issued | 2011-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18538 | |
| dc.title | Design and characterization of CMOS compatible mircromirror arrays in SiGe MEMS technology | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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