Publication:
Plasma-damage mitigation of a 2.0 PECVD porous organo silicon glass by pore stuffing
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1787 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-15
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Views
1787 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-15
Citations