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Low temperature electrical performance of ultrathin oxide MOS capacitors with p+ poly-Si1-xGex and poly-Si gate materials
Publication:
Low temperature electrical performance of ultrathin oxide MOS capacitors with p+ poly-Si1-xGex and poly-Si gate materials
Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jacob, A. P.
;
Myrberg, T.
;
Yousif, M. Y. A.
;
Nur, O.
;
Willander, M.
;
Lundgren, P.
;
Sveinbjörnson, E. Ö.
;
Caymax, Matty
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1919
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1919
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations