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Articles
Wafer-level MEMS packaging
Publication:
Wafer-level MEMS packaging
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Parton, Els
;
Tilmans, Harrie
Journal
Advanced Packaging
Abstract
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1968
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1968
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-16
Citations