Publication:
Wafer-level MEMS packaging
Date
| dc.contributor.author | Parton, Els | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.imecauthor | Parton, Els | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.date.accessioned | 2021-10-14T22:43:15Z | |
| dc.date.available | 2021-10-14T22:43:15Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6699 | |
| dc.source.beginpage | 21 | |
| dc.source.endpage | 23 | |
| dc.source.issue | 4 | |
| dc.source.journal | Advanced Packaging | |
| dc.source.volume | 11 | |
| dc.title | Wafer-level MEMS packaging | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |