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Electrical performance and scalability of Ni-monosilicide towards sub 0.13 μm technologies
Publication:
Electrical performance and scalability of Ni-monosilicide towards sub 0.13 μm technologies
Date
2001
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lauwers, A.
;
de Potter de ten Broeck, Muriel
;
Lindsay, Richard
;
Steegen, An
;
Roelandts, Nico
;
Lossen, F.
;
Vrancken, Christa
;
Maex, Karen
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2027
since deposited on 2021-10-14
Acq. date: 2025-10-24
Citations
Metrics
Views
2027
since deposited on 2021-10-14
Acq. date: 2025-10-24
Citations