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Carrier profiling in high vacuum using Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy
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Carrier profiling in high vacuum using Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy
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Date
2020
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wouters, Lennaert
;
Minj, Albert
;
Celano, Umberto
;
Hantschel, Thomas
;
Paredis, Kristof
;
Vandervorst, Wilfried
Journal
Park Systems.com: Application Note #54
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2014
since deposited on 2021-10-29
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Acq. date: 2025-12-18
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Views
2014
since deposited on 2021-10-29
1
last month
Acq. date: 2025-12-18
Citations