The influence of He plasma pretreatment on O and H atom interaction with low-k nanoporous materials

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Author(s)

Braginsky, O.V.

;

Kovalev, A.S.

;

Lopaev, D.V.

;

Malykhin, E.M.

;

Mankelevich, Y.A.

;

Rakhimova, T.V.

;

Rakhimov, A.T.

;

Vasilieva, A.N.

;

Zyryanov, S.M.

;

Baklanov, Mikhaïl

Metrics

1913 since deposited on 2021-10-17

Acq. date: 2025-10-23