Publication:
The influence of He plasma pretreatment on O and H atom interaction with low-k nanoporous materials
Date
| dc.contributor.author | Braginsky, O.V. | |
| dc.contributor.author | Kovalev, A.S. | |
| dc.contributor.author | Lopaev, D.V. | |
| dc.contributor.author | Malykhin, E.M. | |
| dc.contributor.author | Mankelevich, Y.A. | |
| dc.contributor.author | Rakhimova, T.V. | |
| dc.contributor.author | Rakhimov, A.T. | |
| dc.contributor.author | Vasilieva, A.N. | |
| dc.contributor.author | Zyryanov, S.M. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-17T21:27:28Z | |
| dc.date.available | 2021-10-17T21:27:28Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15035 | |
| dc.source.conference | 62nd Annual Gaseous Electronics Conference - GEC | |
| dc.source.conferencedate | 20/10/2009 | |
| dc.source.conferencelocation | Saratoga Springs, NY USA | |
| dc.title | The influence of He plasma pretreatment on O and H atom interaction with low-k nanoporous materials | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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