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Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates
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Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates
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Date
1997
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jin, S.
;
Bender, Hugo
;
Li, X. N.
;
Zhang, Zheng
;
Dong, C.
;
Gong, Z. X.
;
Ma, T. C.
Journal
Applied Surface Science
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1950
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1950
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-10
Citations