Publication:

Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates

Date

1997
Journal article
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dc.contributor.authorJin, S.
dc.contributor.authorBender, Hugo
dc.contributor.authorLi, X. N.
dc.contributor.authorZhang, Zheng
dc.contributor.authorDong, C.
dc.contributor.authorGong, Z. X.
dc.contributor.authorMa, T. C.
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-09-30T08:31:07Z
dc.date.available2021-09-30T08:31:07Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1956
dc.source.beginpage116
dc.source.endpage123
dc.source.issue2
dc.source.journalApplied Surface Science
dc.source.volume115
dc.title

Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates

dc.typeJournal article
dspace.entity.typePublication
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