Record GmSAT/SSSAT and PBTI reliability in Si-passivated Ge nFinFETs by improved gate stack surface preparation

Arimura, Hiroaki; Cott, Daire; Boccardi, Guillaume; Loo, Roger; Wostyn, Kurt; Witters, Liesbeth; Conard, Thierry; Suhard, Samuel; van Dorp, Dennis; Dekkers, Harold; Ragnarsson, Lars-Ake; Mitard, Jerome; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine; Horiguchi, Naoto

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Record GmSAT/SSSAT and PBTI reliability in Si-passivated Ge nFinFETs by improved gate stack surface preparation

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2019

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IEEE Transactions on Electron Devices

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Acq. date: 2026-04-05

Record GmSAT/SSSAT and PBTI reliability in Si-passivated Ge nFinFETs by improved gate stack surface preparation

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