Publication:
Depth profiling of strain using micro-Raman measurements
Date
| dc.contributor.author | Atkinson, A. | |
| dc.contributor.author | Jain, Suresh | |
| dc.contributor.author | Maes, Herman | |
| dc.contributor.author | Pinardi, Kuntjoro | |
| dc.contributor.author | Willander, M. | |
| dc.date.accessioned | 2021-10-14T16:36:15Z | |
| dc.date.available | 2021-10-14T16:36:15Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5017 | |
| dc.source.beginpage | 584 | |
| dc.source.endpage | 588 | |
| dc.source.issue | 7 | |
| dc.source.journal | Semiconductor Science and Technology | |
| dc.source.volume | 16 | |
| dc.title | Depth profiling of strain using micro-Raman measurements | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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