Publication:

Impact of thinning and through silicon via proximity on high-k / metal gate first CMOS performance

Date

2010
Proceedings Paper
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Author(s)

Mercha, Abdelkarim  
;
Redolfi, Augusto  
;
Stucchi, Michele  
;
Minas, Nikolaos
;
Van Olmen, Jan  
;
Thangaraju, Sarasvathi
;
Velenis, Dimitrios  
;
Domae, Shinichi
;
Yang, Yu
;
Katti, Guruprasad
;
Labie, Riet  
;
Okoro, Chukwudi
;
Zhao, Ming  
;
Asimakopoulos, Panagiotis
;
De Wolf, Ingrid  
;
Chiarella, Thomas  
;
Schram, Tom  
;
Rohr, Erika
;
Van Ammel, Annemie  
;
Jourdain, Anne  
;
Ruythooren, Wouter  
;
Armini, Silvia  
;
Radisic, Alex  
;
Philipsen, Harold  
;
Heylen, Nancy  
;
Kostermans, Maarten
;
Jaenen, Patrick  
;
Sleeckx, Erik  
;
Sabuncuoglu Tezcan, Deniz  
;
Debusschere, Ingrid  
;
Soussan, Philippe  
;
Perry, Dan
;
Van der Plas, Geert  
;
Cho, Jong Hoon
;
Marchal, Pol
;
Travaly, Youssef
;
Beyne, Eric  
;
Biesemans, Serge  
;
Swinnen, Bart  

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