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Study of SF6/N2O microwave plasma for surface texturing of multi-crystalline (< 150 μm) solar substrates
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Study of SF6/N2O microwave plasma for surface texturing of multi-crystalline (< 150 μm) solar substrates
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chan, BT
Journal
Japanese Journal of Applied Physics
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1805
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Acq. date: 2025-12-16
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Views
1805
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-16
Citations