Study of SF6/N2O microwave plasma for surface texturing of multi-crystalline (< 150 μm) solar substrates

dc.contributor.author	Chan, BT
dc.contributor.editor	Kunnen, Eddy
dc.contributor.editor	Uhlig, Matthias
dc.contributor.editor	de Marneffe, Jean-Francois
dc.contributor.editor	Xu, Kaidong
dc.contributor.editor	Boullart, Werner
dc.contributor.editor	Rau, Bernd
dc.contributor.editor	Poortmans, Jef
dc.contributor.imecauthor	Chan, BT
dc.contributor.orcidimec	Chan, BT::0000-0003-2890-0388
dc.date.accessioned	2021-10-20T10:13:39Z
dc.date.available	2021-10-20T10:13:39Z
dc.date.embargo	9999-12-31
dc.date.issued	2012
dc.identifier.issn	0021-4922
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/20433
dc.source.beginpage	10NA01
dc.source.issue	10_2
dc.source.journal	Japanese Journal of Applied Physics
dc.source.volume	51
dc.title	Study of SF6/N2O microwave plasma for surface texturing of multi-crystalline (< 150 μm) solar substrates
dc.type	Journal article
dspace.entity.type	Publication
Files	Original bundle Name: 24720.pdf Size: 1.03 MB Format: Adobe Portable Document Format Download
Publication available in collections:	Articles