Publication:
Orientation dependence of Si1-xCx:P growth and the impact on FinFET structues
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1927 since deposited on 2021-10-20
4last month
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Acq. date: 2026-08-05
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Statistics
Views
1927 since deposited on 2021-10-20
4last month
2last week
Acq. date: 2026-08-05
Citations