Publication:
Orientation dependence of Si1-xCx:P growth and the impact on FinFET structues
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1916 since deposited on 2021-10-20
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Acq. date: 2025-10-25
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Views
1916 since deposited on 2021-10-20
421item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations