Publication:
Orientation dependence of Si1-xCx:P growth and the impact on FinFET structues
Date
| dc.contributor.author | Tolle, John | |
| dc.contributor.author | Weeks, Doran | |
| dc.contributor.author | Bauer, Matthias | |
| dc.contributor.author | Machkaoutsan, Vladimir | |
| dc.contributor.author | Maes, Jan | |
| dc.contributor.author | Togo, Mitsuhiro | |
| dc.contributor.author | Brus, Stephan | |
| dc.contributor.author | Hikavyy, Andriy | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.imecauthor | Machkaoutsan, Vladimir | |
| dc.contributor.imecauthor | Maes, Jan | |
| dc.contributor.imecauthor | Brus, Stephan | |
| dc.contributor.imecauthor | Hikavyy, Andriy | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-20T17:02:51Z | |
| dc.date.available | 2021-10-20T17:02:51Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21623 | |
| dc.source.beginpage | 3160 | |
| dc.source.conference | 222nd ECS Meeting, Pacific RIM Meeting on Electrochemical and Solid-State Science | |
| dc.source.conferencedate | 7/10/2012 | |
| dc.source.conferencelocation | Honolulu, HI USA | |
| dc.title | Orientation dependence of Si1-xCx:P growth and the impact on FinFET structues | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
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