Publication:
Improving the growth of HfO2 ALD layers by modifying growth parameters and reducing precursors contaminants
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1786 since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations
Metrics
Views
1786 since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations