Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
Improving the growth of HfO2 ALD layers by modifying growth parameters and reducing precursors contaminants
Statistics
Statistics by Category
Download view's map
PNG
JPEG/JPG
Reports
Most viewed
Most viewed per month
Top city views
File Visits
Export Excel
Export CSV
Item
Views
Improving the growth of HfO2 ALD layers by modifying growth parameters and reducing precursors contaminants
1339