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A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap
Publication:
A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap
Date
1999
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kondoh, Eiichi
;
Conard, Thierry
;
Brijs, Bert
;
Jin, S.
;
Bender, Hugo
;
de Potter de ten Broeck, Muriel
;
Maex, Karen
Journal
J. Materials Research
Abstract
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2070
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations
Metrics
Views
2070
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations