A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap

dc.contributor.author	Kondoh, Eiichi
dc.contributor.author	Conard, Thierry
dc.contributor.author	Brijs, Bert
dc.contributor.author	Jin, S.
dc.contributor.author	Bender, Hugo
dc.contributor.author	de Potter de ten Broeck, Muriel
dc.contributor.author	Maex, Karen
dc.contributor.imecauthor	Conard, Thierry
dc.contributor.imecauthor	Bender, Hugo
dc.contributor.imecauthor	de Potter de ten Broeck, Muriel
dc.contributor.imecauthor	Maex, Karen
dc.contributor.orcidimec	Conard, Thierry::0000-0002-4298-5851
dc.date.accessioned	2021-10-06T11:33:05Z
dc.date.available	2021-10-06T11:33:05Z
dc.date.embargo	9999-12-31
dc.date.issued	1999
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3570
dc.source.beginpage	4402
dc.source.endpage	4408
dc.source.issue	11
dc.source.journal	J. Materials Research
dc.source.volume	14
dc.title	A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap
dc.type	Journal article
dspace.entity.type	Publication
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