Publication:

Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacks

Date

2023
Proceedings Paper
https://doi.org/10.1109/iitc/mam57687.2023.101548
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Accepted version 677.61 KB

Author(s)

Chang, Xinyue  
;
Oprins, Herman  
;
Lofrano, Melina  
;
Cherman, Vladimir  
;
Vermeersch, Bjorn  
;
Diaz Fortuny, Javier  
;
Park, Seongho  
;
Tokei, Zsolt  
;
De Wolf, Ingrid  

Journal

No

Abstract

Description

Statistics

Downloads

1758 since deposited on 2023-08-07
102last month
38last week
Acq. date: 2026-07-18

Views

1014 since deposited on 2023-08-07
3last month
2last week
Acq. date: 2026-07-18

Citations

Statistics

Downloads

1758 since deposited on 2023-08-07
102last month
38last week
Acq. date: 2026-07-18

Views

1014 since deposited on 2023-08-07
3last month
2last week
Acq. date: 2026-07-18

Citations