Publication:

Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacks

Date

2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.101548
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Author(s)

Chang, Xinyue  
;
Oprins, Herman  
;
Lofrano, Melina  
;
Cherman, Vladimir  
;
Vermeersch, Bjorn  
;
Diaz Fortuny, Javier  
;
Park, Seongho  
;
Tokei, Zsolt  
;
De Wolf, Ingrid  

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No

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1546 since deposited on 2023-08-07
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1011 since deposited on 2023-08-07
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Acq. date: 2026-04-27

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