Publication:

Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacks

Date

2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.101548
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dc.contributor.authorChang, Xinyue
dc.contributor.authorOprins, Herman
dc.contributor.authorLofrano, Melina
dc.contributor.authorCherman, Vladimir
dc.contributor.authorVermeersch, Bjorn
dc.contributor.authorDiaz Fortuny, Javier
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorChang, Xinyue
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorVermeersch, Bjorn
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDiaz Fortuny, Javier
dc.contributor.orcidimecChang, Xinyue::0000-0003-1875-6132
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecCherman, Vladimir::0000-0002-8068-9236
dc.contributor.orcidimecVermeersch, Bjorn::0000-0001-8640-672X
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecLofrano, Melina::0000-0002-3930-6459
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.contributor.orcidimecDiaz Fortuny, Javier::0000-0002-8186-071X
dc.date.accessioned2023-11-29T09:04:54Z
dc.date.available2023-08-07T17:07:25Z
dc.date.available2023-08-09T06:30:20Z
dc.date.available2023-11-29T09:04:54Z
dc.date.embargo2023-05-31
dc.date.issued2023
dc.identifier.doi10.1109/IITC/MAM57687.2023.101548
dc.identifier.eisbn979-8-3503-1097-9
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42294
dc.publisherIEEE
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM)
dc.source.conferencedateMAY 22-25, 2023
dc.source.conferencelocationDresden
dc.source.journalNo
dc.source.numberofpages3
dc.title

Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacks

dc.typeProceedings paper
dspace.entity.typePublication
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